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| Volume (m³) | Model (P/N) | Cabinet Inner Size (mm) | Temp (℃) | Humidity (%RH) | Pressure (MPa) | Power (kW) | Weight (kg) |
|---|---|---|---|---|---|---|---|
| 1 | HMQ-1 | 1400x700x1000 | 30~70 | 40~80 | -0.08~0.08 | 45 | 1000 |
| 2 | HMQ-2 | 1650x1000x1200 | 2000 | ||||
| 3 | HMQ-3 | 2500x1000x1200 | 3000 | ||||
| 6 | HMQ-6 | 2900x1350x1550 | 100 | 5000 | |||
| 15 | HMQ-15 | 5600x1350x2000 | 9000 | ||||
| 30 | HMQ-30 | 10000x1350x2000 | 15000 | ||||
| 100 | HMQ-100 | 16500x2700x2200 | 30~70 | 40~80 | -0.08~0.08 | 120 | 45000 |






